Tool installation and Relocation in fact is a kind of project management. It fully exemplify the responsible FSE’s (Field Service Engineer) communication and coordination capability. In general, a semiconductor system often requires several supportive subsystems in addition to the main system and the range of facility involved includes all kind of facilities such as cooling water, air pipes, vacuum pipes, power distribution, and signal lines…. etc. and there are high risk hidden such as hazardous gases, high temperature, high voltage…. etc. Such kind of work not only requires experienced and professional engineers but also tests the engineer’s communication and coordination capabilities.