| Servicing and Refurbish |
| – Strong Trouble-Shooting Capability and Putting Ourselves in Customer’s Shoes |
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TSSC, in customer’s position, is deeply aware of all subsystems for servicing or system parts require complete inspection before making sure no other problem will happen when user turns the system on. To this end, TSSC invested significant amount of manpower and material in establishing all kinds of testing platform to make sure the functionality of servicing or refurbish of subsystem and system parts meets customer’s needs. As parts assembled in semiconductor equipment cover very wide range, TSSC invited quite a few senior equipment engineers, masters, and doctors from the OEM’s and well know semiconductor manufacturers to build up a huge and in-depth knowledge database to provide total solutions for all kinds of parts or subsystems of manufacturing equipment. And this has become TSSC’s Strong Trouble-Shooting Capabilities. Our servicing test platform includes the following: |
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| RPS (Remote Plasma System) Test Platform |
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Complete simulation of system’s using environment, including:
▲ Gas Flow Control
▲ Vacuum Pressure Control
▲ Electrical Current and Power Monitoring
▲ Particle Count Detection
▲ Cooling Water Flow Control
▲ Fully Automated Control Software
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| Vacuum Test Platform |
We have designed all kinds of fixtures to suit different customers’ needs to find out the real leaking point or problem area of object to be serviced, repair and fix it, and uses this to confirm the functionality of the repaired object meets customer’s requirement. |
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We owns the following testing tools and methods:
▲Helium Detector (INFICON UL1000, 10-12 mbar · l · s-1)
▲RGA (Residual Gas Analysers )
▲Pressure Test Platform
▲Cylinder Cycle Tester
▲Static Leakage Test
▲Dynamic Leakage Test
▲High Temperature Leakage Test
▲Cylinder Motion Repetition Test |
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| RF Match Box Test Platform |
We repair the Matching Box based on customer’s different requirement in order to reach the true customized servicing. As there are different process conditions to different customers, leading to the impedance in reaction chamber also changes with the process condition. In view of this, we are willing to cooperate with customers in order to discover the final testing conditions of its Matching Box based on each customer in order to secure stability of Matching Box after the completion of Repairing. |
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Adaptor
Power : 3,000[W]
Input : N type
Output : clip type
Detector : V/I probe |
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Dynamic Dummy Load
Power : 3,000[W]
Variable Impedance |
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Throttle Valve Test Platform
We have installed:
▲Mass Flow Controller (MFC)
▲Vacuum Pipe
▲Vacuum Pump
▲Vacuum Pressure Gauge
▲Automatic Feedback Control System (PID)
In order to confirm the stability and response of throttle valve.
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| Spindle Test Platform |
Simulate the using environment of Spindle on system to design the test platform and use the leveraging measurement meter to perform off-axial test. |
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| Heater Temperature Test Platform |
Self developed heater temperature system to use PID feedback control so as to reach customer required temperature by changing sampling time to record temperature rising process. |
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| DC Power Supply & PCB Servicing |
When servicing related parts of the system, we inevitably will encounter problem generated by PCB and power supply. Engineers of TSSC therefore have accumulated tremendous amount of PCB repairing experience. We also have installed all kinds of equipment including digital oscilloscope, single/dual DC power supply, function signal generator, high impedance meter, electronic dummy load, high voltage bar… etc. for making the best judgment to the related problem. |
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